TY - GEN
T1 - Liquid motor driven by electrowetting
AU - Takei, A.
AU - Binh-Khiem, N.
AU - Iwase, E.
AU - Matsumoto, K.
AU - Shimoyama, I.
PY - 2008/8/29
Y1 - 2008/8/29
N2 - We propose a liquid motor using surface tension. Our liquid motor is composed of a liquid droplet, a floating plate and a lower plate. The plate floating on the droplet is rotated continuously by electrowetting actuation. The floating plate is asymmetrically and has four cogs. By electrowetting actuation, the shape of the droplet is deformed. Then, the floating plate rotates to the position where the surface energy of the sandwiched liquid takes a minimum value. On the lower plate, electrodes are patterned in an annular shape. By choosing the voltage-applied electrodes, the position of the floating plate is controlled. In this research, a 2 mm floating plate with a 500 μm silicon cube was rotated at 180 rpm. This motor is useful for optical devices because the components of the liquid motor can be made of transparent materials.
AB - We propose a liquid motor using surface tension. Our liquid motor is composed of a liquid droplet, a floating plate and a lower plate. The plate floating on the droplet is rotated continuously by electrowetting actuation. The floating plate is asymmetrically and has four cogs. By electrowetting actuation, the shape of the droplet is deformed. Then, the floating plate rotates to the position where the surface energy of the sandwiched liquid takes a minimum value. On the lower plate, electrodes are patterned in an annular shape. By choosing the voltage-applied electrodes, the position of the floating plate is controlled. In this research, a 2 mm floating plate with a 500 μm silicon cube was rotated at 180 rpm. This motor is useful for optical devices because the components of the liquid motor can be made of transparent materials.
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U2 - 10.1109/MEMSYS.2008.4443588
DO - 10.1109/MEMSYS.2008.4443588
M3 - Conference contribution
AN - SCOPUS:50149107234
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 42
EP - 45
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -