Liquid phase epitaxy of 4H-SiC layers on on-axis PVT grown substrates

Kazuhiko Kusunoki, Kazuhito Kamei, Nobuyoshi Yashiro, Ryo Hattori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy