Lithium niobate membrane on silicon platform for waveguide sensor

Eiki Mochizuki, Yusuke Muranaka, Sunao Kurimura, Kiyofumi Kikuchi, Akihiro Terasaki, Hirochika Nakajima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

    Original languageEnglish
    Title of host publicationConference Program - MOC'11: 17th Microoptics Conference
    Publication statusPublished - 2011
    Event17th Microoptics Conference, MOC'11 - Sendai
    Duration: 2011 Oct 302011 Nov 2

    Other

    Other17th Microoptics Conference, MOC'11
    CitySendai
    Period11/10/3011/11/2

    Fingerprint

    Photosensitivity
    Optical waveguides
    Silicon
    lithium niobates
    optical waveguides
    Etching
    Waveguides
    Lithium
    platforms
    etching
    membranes
    waveguides
    Membranes
    Fabrication
    fabrication
    Fluids
    fluids
    sensitivity
    sensors
    Sensors

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics

    Cite this

    Mochizuki, E., Muranaka, Y., Kurimura, S., Kikuchi, K., Terasaki, A., & Nakajima, H. (2011). Lithium niobate membrane on silicon platform for waveguide sensor. In Conference Program - MOC'11: 17th Microoptics Conference [6110335]

    Lithium niobate membrane on silicon platform for waveguide sensor. / Mochizuki, Eiki; Muranaka, Yusuke; Kurimura, Sunao; Kikuchi, Kiyofumi; Terasaki, Akihiro; Nakajima, Hirochika.

    Conference Program - MOC'11: 17th Microoptics Conference. 2011. 6110335.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Mochizuki, E, Muranaka, Y, Kurimura, S, Kikuchi, K, Terasaki, A & Nakajima, H 2011, Lithium niobate membrane on silicon platform for waveguide sensor. in Conference Program - MOC'11: 17th Microoptics Conference., 6110335, 17th Microoptics Conference, MOC'11, Sendai, 11/10/30.
    Mochizuki E, Muranaka Y, Kurimura S, Kikuchi K, Terasaki A, Nakajima H. Lithium niobate membrane on silicon platform for waveguide sensor. In Conference Program - MOC'11: 17th Microoptics Conference. 2011. 6110335
    Mochizuki, Eiki ; Muranaka, Yusuke ; Kurimura, Sunao ; Kikuchi, Kiyofumi ; Terasaki, Akihiro ; Nakajima, Hirochika. / Lithium niobate membrane on silicon platform for waveguide sensor. Conference Program - MOC'11: 17th Microoptics Conference. 2011.
    @inproceedings{10ac195cbe244c968ef0928b32fa8e9a,
    title = "Lithium niobate membrane on silicon platform for waveguide sensor",
    abstract = "Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.",
    author = "Eiki Mochizuki and Yusuke Muranaka and Sunao Kurimura and Kiyofumi Kikuchi and Akihiro Terasaki and Hirochika Nakajima",
    year = "2011",
    language = "English",
    isbn = "9784863481824",
    booktitle = "Conference Program - MOC'11: 17th Microoptics Conference",

    }

    TY - GEN

    T1 - Lithium niobate membrane on silicon platform for waveguide sensor

    AU - Mochizuki, Eiki

    AU - Muranaka, Yusuke

    AU - Kurimura, Sunao

    AU - Kikuchi, Kiyofumi

    AU - Terasaki, Akihiro

    AU - Nakajima, Hirochika

    PY - 2011

    Y1 - 2011

    N2 - Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

    AB - Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

    UR - http://www.scopus.com/inward/record.url?scp=84855888261&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84855888261&partnerID=8YFLogxK

    M3 - Conference contribution

    SN - 9784863481824

    BT - Conference Program - MOC'11: 17th Microoptics Conference

    ER -