Lithium niobate membrane on silicon platform for waveguide sensor

Eiki Mochizuki; Yusuke Muranaka; Sunao Kurimura; Kiyofumi Kikuchi; Akihiro Terasaki; Hirochika Nakajima

Lithium niobate membrane on silicon platform for waveguide sensor

Eiki Mochizuki^*, Yusuke Muranaka, Sunao Kurimura, Kiyofumi Kikuchi, Akihiro Terasaki, Hirochika Nakajima

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

Original language	English
Title of host publication	Conference Program - MOC'11: 17th Microoptics Conference
Publication status	Published - 2011
Event	17th Microoptics Conference, MOC'11 - Sendai Duration: 2011 Oct 30 → 2011 Nov 2

Other

Other	17th Microoptics Conference, MOC'11
City	Sendai
Period	11/10/30 → 11/11/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Cite this

@inproceedings{10ac195cbe244c968ef0928b32fa8e9a,

title = "Lithium niobate membrane on silicon platform for waveguide sensor",

abstract = "Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.",

author = "Eiki Mochizuki and Yusuke Muranaka and Sunao Kurimura and Kiyofumi Kikuchi and Akihiro Terasaki and Hirochika Nakajima",

year = "2011",

language = "English",

isbn = "9784863481824",

booktitle = "Conference Program - MOC'11: 17th Microoptics Conference",

note = "17th Microoptics Conference, MOC'11 ; Conference date: 30-10-2011 Through 02-11-2011",

}

TY - GEN

T1 - Lithium niobate membrane on silicon platform for waveguide sensor

AU - Mochizuki, Eiki

AU - Muranaka, Yusuke

AU - Kurimura, Sunao

AU - Kikuchi, Kiyofumi

AU - Terasaki, Akihiro

AU - Nakajima, Hirochika

PY - 2011

Y1 - 2011

N2 - Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

AB - Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

UR - http://www.scopus.com/inward/record.url?scp=84855888261&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84855888261&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84855888261

SN - 9784863481824

BT - Conference Program - MOC'11: 17th Microoptics Conference

T2 - 17th Microoptics Conference, MOC'11

Y2 - 30 October 2011 through 2 November 2011

ER -

Lithium niobate membrane on silicon platform for waveguide sensor

Abstract

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ASJC Scopus subject areas

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