Lithium niobate membrane on silicon platform for waveguide sensor

Eiki Mochizuki, Yusuke Muranaka, Sunao Kurimura, Kiyofumi Kikuchi, Akihiro Terasaki, Hirochika Nakajima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Cladless nonlinear optical waveguide is fascinating for high-sensitivity light-fluid interaction. Membrane composed of 4μm-thick Mg:LN is fabricated by an etching process on a silicon platform. Novel fabrication process will be introduced for various sensing applications.

    Original languageEnglish
    Title of host publicationConference Program - MOC'11: 17th Microoptics Conference
    Publication statusPublished - 2011
    Event17th Microoptics Conference, MOC'11 - Sendai
    Duration: 2011 Oct 302011 Nov 2

    Other

    Other17th Microoptics Conference, MOC'11
    CitySendai
    Period11/10/3011/11/2

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    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics

    Cite this

    Mochizuki, E., Muranaka, Y., Kurimura, S., Kikuchi, K., Terasaki, A., & Nakajima, H. (2011). Lithium niobate membrane on silicon platform for waveguide sensor. In Conference Program - MOC'11: 17th Microoptics Conference [6110335]