Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method

Ryo Takigawa, Eiji Higurashi, Tetsuya Kawanishi, Tanemasa Asano

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This paper demonstrates the application of ultra-precision cutting to the fabrication of ridged LiNbO3 waveguides for use in low-loss photonic integrated circuits. Ridged waveguides with sidewall verticality of 88° and ultra-smooth sidewalls were obtained in LiNbO3 crystals using this technique. In addition, the possibility of fabricating bent ridged waveguides via this mechanical micromachining method was examined. The root mean square surface roughness of the machined sidewall was 4.5 nm over an area of 2.5 × 10 μm, which is sufficiently low so as to minimize scattering losses of guided light. The propagation loss of the ridged waveguide produced during this work was well below 1 dB/cm at a wavelength of 1550 nm. The present technique should have significant applicability to the micromachining of ferroelectric materials and the fabrication of highly confined optical waveguides such as ridged waveguides and photonic wires.

Original languageEnglish
Pages (from-to)27733-27738
Number of pages6
JournalOptics Express
Volume22
Issue number22
DOIs
Publication statusPublished - 2014
Externally publishedYes

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lithium niobates
waveguides
micromachining
photonics
fabrication
ferroelectric materials
optical waveguides
integrated circuits
surface roughness
wire
propagation
scattering
wavelengths
crystals

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method. / Takigawa, Ryo; Higurashi, Eiji; Kawanishi, Tetsuya; Asano, Tanemasa.

In: Optics Express, Vol. 22, No. 22, 2014, p. 27733-27738.

Research output: Contribution to journalArticle

Takigawa, Ryo ; Higurashi, Eiji ; Kawanishi, Tetsuya ; Asano, Tanemasa. / Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method. In: Optics Express. 2014 ; Vol. 22, No. 22. pp. 27733-27738.
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