This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
|Number of pages||6|
|Journal||International Journal of Microwave and Wireless Technologies|
|Publication status||Published - 2009 Feb 1|
- Piezoelectric actuator
ASJC Scopus subject areas
- Electrical and Electronic Engineering