Abstract
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
| Original language | English |
|---|---|
| Pages (from-to) | 37-42 |
| Number of pages | 6 |
| Journal | International Journal of Microwave and Wireless Technologies |
| Volume | 1 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2009 Feb 1 |
| Externally published | Yes |
Keywords
- Bending
- LBC
- MEMS
- PZT
- Piezoelectric actuator
ASJC Scopus subject areas
- Electrical and Electronic Engineering
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Cite this
Ikehashi, T., Ogawa, E., Yamazaki, H., & Ohguro, T. (2009). Lithographical bending control method for a piezoelectric actuator. International Journal of Microwave and Wireless Technologies, 1(1), 37-42. https://doi.org/10.1017/S1759078709000051