Abstract
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
| Original language | English |
|---|---|
| Pages (from-to) | 37-42 |
| Number of pages | 6 |
| Journal | International Journal of Microwave and Wireless Technologies |
| Volume | 1 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2009 Feb 1 |
| Externally published | Yes |
Fingerprint
Keywords
- Bending
- LBC
- MEMS
- Piezoelectric actuator
- PZT
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Lithographical bending control method for a piezoelectric actuator. / Ikehashi, Tamio; Ogawa, Etsuji; Yamazaki, Hiroaki; Ohguro, Tatsuya.
In: International Journal of Microwave and Wireless Technologies, Vol. 1, No. 1, 01.02.2009, p. 37-42.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Lithographical bending control method for a piezoelectric actuator
AU - Ikehashi, Tamio
AU - Ogawa, Etsuji
AU - Yamazaki, Hiroaki
AU - Ohguro, Tatsuya
PY - 2009/2/1
Y1 - 2009/2/1
N2 - This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
AB - This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
KW - Bending
KW - LBC
KW - MEMS
KW - Piezoelectric actuator
KW - PZT
UR - http://www.scopus.com/inward/record.url?scp=78651550392&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78651550392&partnerID=8YFLogxK
U2 - 10.1017/S1759078709000051
DO - 10.1017/S1759078709000051
M3 - Article
AN - SCOPUS:78651550392
VL - 1
SP - 37
EP - 42
JO - International Journal of Microwave and Wireless Technologies
JF - International Journal of Microwave and Wireless Technologies
SN - 1759-0787
IS - 1
ER -