Abstract
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
Original language | English |
---|---|
Pages (from-to) | 37-42 |
Number of pages | 6 |
Journal | International Journal of Microwave and Wireless Technologies |
Volume | 1 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2009 Feb 1 |
Externally published | Yes |
Keywords
- Bending
- LBC
- MEMS
- PZT
- Piezoelectric actuator
ASJC Scopus subject areas
- Electrical and Electronic Engineering