Lithographical bending control method for a piezoelectric actuator

Tamio Ikehashi, Etsuji Ogawa, Hiroaki Yamazaki, Tatsuya Ohguro

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

Original languageEnglish
Pages (from-to)37-42
Number of pages6
JournalInternational Journal of Microwave and Wireless Technologies
Volume1
Issue number1
DOIs
Publication statusPublished - 2009 Feb 1
Externally publishedYes

Keywords

  • Bending
  • LBC
  • MEMS
  • PZT
  • Piezoelectric actuator

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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