Lithographical bending control method for a piezoelectric actuator

Tamio Ikehashi; Etsuji Ogawa; Hiroaki Yamazaki; Tatsuya Ohguro

doi:10.1017/S1759078709000051

Lithographical bending control method for a piezoelectric actuator

Tamio Ikehashi, Etsuji Ogawa, Hiroaki Yamazaki, Tatsuya Ohguro

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

Original language	English
Pages (from-to)	37-42
Number of pages	6
Journal	International Journal of Microwave and Wireless Technologies
Volume	1
Issue number	1
DOIs	https://doi.org/10.1017/S1759078709000051
Publication status	Published - 2009 Feb 1
Externally published	Yes

Keywords

Bending
LBC
MEMS
PZT
Piezoelectric actuator

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1017/S1759078709000051

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abstract = "This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.",

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AU - Ogawa, Etsuji

AU - Yamazaki, Hiroaki

AU - Ohguro, Tatsuya

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N2 - This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

AB - This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

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KW - LBC

KW - MEMS

KW - PZT

KW - Piezoelectric actuator

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Lithographical bending control method for a piezoelectric actuator

Abstract

Keywords

ASJC Scopus subject areas

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