Lithographical bending control method for a piezoelectric actuator

Tamio Ikehashi, Etsuji Ogawa, Hiroaki Yamazaki, Tatsuya Ohguro

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

Original languageEnglish
Pages (from-to)37-42
Number of pages6
JournalInternational Journal of Microwave and Wireless Technologies
Volume1
Issue number1
DOIs
Publication statusPublished - 2009 Feb 1
Externally publishedYes

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Piezoelectric actuators
Piezoelectric materials

Keywords

  • Bending
  • LBC
  • MEMS
  • Piezoelectric actuator
  • PZT

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Lithographical bending control method for a piezoelectric actuator. / Ikehashi, Tamio; Ogawa, Etsuji; Yamazaki, Hiroaki; Ohguro, Tatsuya.

In: International Journal of Microwave and Wireless Technologies, Vol. 1, No. 1, 01.02.2009, p. 37-42.

Research output: Contribution to journalArticle

Ikehashi, Tamio ; Ogawa, Etsuji ; Yamazaki, Hiroaki ; Ohguro, Tatsuya. / Lithographical bending control method for a piezoelectric actuator. In: International Journal of Microwave and Wireless Technologies. 2009 ; Vol. 1, No. 1. pp. 37-42.
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