Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing

Ryosuke Fukuda, Priyadharshini Balasubramanian, Itaru Higashimata, Godai Koike, Takuma Okada, Risa Kagami, Tokuyuki Teraji, Shinobu Onoda, Moriyoshi Haruyama, Keisuke Yamada, Masafumi Inaba, Hayate Yamano, Felix M. Stürner, Simon Schmitt, Liam P. McGuinness, Fedor Jelezko, Takeshi Ohshima, Takahiro Shinada, Hiroshi Kawarada, Wataru KadaOsamu Hanaizumi, Takashi Tanii, Junichi Isoya

    Research output: Contribution to journalArticle

    3 Citations (Scopus)

    Abstract

    The simultaneous control of the number and position of negatively charged nitrogen-vacancy (NV) centers in diamond was achieved. While single near-surface NV centers are known to exhibit outstanding capabilities in external spin sensing, trade-off relationships among the accuracy of the number and position, and the coherence of NV centers have made the use of such engineered NV centers difficult. Namely, low-energy nitrogen implantation with lithographic techniques enables the nanoscale position control but results in degradation of the creation yield and the coherence property. In this paper, we show that low-energy nitrogen ion implantation to a 12C (99.95%)-enriched homoepitaxial diamond layer using nanomask is applicable to create shallow NV centers with a sufficiently long coherence time for external spin sensing, at a high creation yield. Furthermore, the NV centers were arranged in a regular array so that 40% lattice sites contain single NV centers. The XY8-k measurements using the individual NV centers reveal that the created NV centers have depths from 2 to 12 nm, which is comparable to the stopping range of nitrogen ions implanted at 2.5 keV. We show that the position-controlled NV centers are capable of external spin sensing with a ultra-high spatial resolution.

    Original languageEnglish
    Article number083029
    JournalNew Journal of Physics
    Volume20
    Issue number8
    DOIs
    Publication statusPublished - 2018 Aug 1

    Fingerprint

    nuclear spin
    diamonds
    nitrogen
    nitrogen ions
    stopping
    ion implantation
    implantation
    spatial resolution
    degradation
    energy
    high resolution

    Keywords

    • diamond
    • nitrogen-vacancy center
    • NMR
    • noise analysis
    • quantum sensing
    • regular array

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

    Cite this

    Fukuda, R., Balasubramanian, P., Higashimata, I., Koike, G., Okada, T., Kagami, R., ... Isoya, J. (2018). Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing. New Journal of Physics, 20(8), [083029]. https://doi.org/10.1088/1367-2630/aad997

    Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing. / Fukuda, Ryosuke; Balasubramanian, Priyadharshini; Higashimata, Itaru; Koike, Godai; Okada, Takuma; Kagami, Risa; Teraji, Tokuyuki; Onoda, Shinobu; Haruyama, Moriyoshi; Yamada, Keisuke; Inaba, Masafumi; Yamano, Hayate; Stürner, Felix M.; Schmitt, Simon; McGuinness, Liam P.; Jelezko, Fedor; Ohshima, Takeshi; Shinada, Takahiro; Kawarada, Hiroshi; Kada, Wataru; Hanaizumi, Osamu; Tanii, Takashi; Isoya, Junichi.

    In: New Journal of Physics, Vol. 20, No. 8, 083029, 01.08.2018.

    Research output: Contribution to journalArticle

    Fukuda, R, Balasubramanian, P, Higashimata, I, Koike, G, Okada, T, Kagami, R, Teraji, T, Onoda, S, Haruyama, M, Yamada, K, Inaba, M, Yamano, H, Stürner, FM, Schmitt, S, McGuinness, LP, Jelezko, F, Ohshima, T, Shinada, T, Kawarada, H, Kada, W, Hanaizumi, O, Tanii, T & Isoya, J 2018, 'Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing', New Journal of Physics, vol. 20, no. 8, 083029. https://doi.org/10.1088/1367-2630/aad997
    Fukuda, Ryosuke ; Balasubramanian, Priyadharshini ; Higashimata, Itaru ; Koike, Godai ; Okada, Takuma ; Kagami, Risa ; Teraji, Tokuyuki ; Onoda, Shinobu ; Haruyama, Moriyoshi ; Yamada, Keisuke ; Inaba, Masafumi ; Yamano, Hayate ; Stürner, Felix M. ; Schmitt, Simon ; McGuinness, Liam P. ; Jelezko, Fedor ; Ohshima, Takeshi ; Shinada, Takahiro ; Kawarada, Hiroshi ; Kada, Wataru ; Hanaizumi, Osamu ; Tanii, Takashi ; Isoya, Junichi. / Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing. In: New Journal of Physics. 2018 ; Vol. 20, No. 8.
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    AU - Onoda, Shinobu

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    AU - Shinada, Takahiro

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