Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to journalArticle

Original languageEnglish
Number of pages1
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume22pt1
Issue number4
DOIs
Publication statusPublished - 1983

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this