| Original language | English |
|---|---|
| Number of pages | 1 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 22pt1 |
| Issue number | 4 |
| Publication status | Published - 1983 Jan 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Lithography Experiments using Synchrotron Radiation from ETL Storage Ring. / Hoh, Koichiro; Hirata, Masahiro; Atoda, Nobufumi; Tanino, Hiroshi; Ichimura, Shingo; Onuki, Hideo.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 22pt1, No. 4, 01.01.1983.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Lithography Experiments using Synchrotron Radiation from ETL Storage Ring
AU - Hoh, Koichiro
AU - Hirata, Masahiro
AU - Atoda, Nobufumi
AU - Tanino, Hiroshi
AU - Ichimura, Shingo
AU - Onuki, Hideo
PY - 1983/1/1
Y1 - 1983/1/1
UR - http://www.scopus.com/inward/record.url?scp=85024276754&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85024276754&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:85024276754
VL - 22pt1
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4
ER -