Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to journalArticle

Original languageEnglish
Number of pages1
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume22pt1
Issue number4
Publication statusPublished - 1983 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Lithography Experiments using Synchrotron Radiation from ETL Storage Ring. / Hoh, Koichiro; Hirata, Masahiro; Atoda, Nobufumi; Tanino, Hiroshi; Ichimura, Shingo; Onuki, Hideo.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 22pt1, No. 4, 01.01.1983.

Research output: Contribution to journalArticle

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