Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)765
Number of pages1
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number4
Publication statusPublished - 1983
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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