Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	765
Number of pages	1
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	22pt1
Issue number	4
DOIs	https://doi.org/10.1143/jjap.22.765
Publication status	Published - 1983
Externally published	Yes

ASJC Scopus subject areas

Research output: Contribution to journal › Article › peer-review

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AU - Hoh, Koichiro

AU - Hirata, Masahiro

AU - Atoda, Nobufumi

AU - Tanino, Hiroshi

AU - Ichimura, Shingo

AU - Onuki, Hideo

PY - 1983

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