@article{9b7e8f20390f42ceb9269a2ed67d18e4,
title = "Lithography Experiments using Synchrotron Radiation from ETL Storage Ring",
author = "Koichiro Hoh and Masahiro Hirata and Nobufumi Atoda and Hiroshi Tanino and Shingo Ichimura and Hideo Onuki",
year = "1983",
doi = "10.1143/jjap.22.765",
language = "English",
volume = "22pt1",
pages = "765",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "4",
}