LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to conferencePaper

2 Citations (Scopus)
Original languageEnglish
Pages611-612
Number of pages2
Publication statusPublished - 1983 Jan 1

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hoh, K., Hirata, M., Atoda, N., Tanino, H., Ichimura, S., & Onuki, H. (1983). LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.. 611-612.