LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to conferencePaper

2 Citations (Scopus)
Original languageEnglish
Pages611-612
Number of pages2
DOIs
Publication statusPublished - 1983

ASJC Scopus subject areas

  • Engineering(all)

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