LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

Research output: Contribution to conferencePaper

2 Citations (Scopus)
Original languageEnglish
Pages611-612
Number of pages2
Publication statusPublished - 1983 Jan 1
Externally publishedYes

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Storage rings
Synchrotron radiation
Lithography
Experiments

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hoh, K., Hirata, M., Atoda, N., Tanino, H., Ichimura, S., & Onuki, H. (1983). LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.. 611-612.

LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING. / Hoh, Koichiro; Hirata, Masahiro; Atoda, Nobufumi; Tanino, Hiroshi; Ichimura, Shingo; Onuki, Hideo.

1983. 611-612.

Research output: Contribution to conferencePaper

Hoh, K, Hirata, M, Atoda, N, Tanino, H, Ichimura, S & Onuki, H 1983, 'LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING.', pp. 611-612.
Hoh, Koichiro ; Hirata, Masahiro ; Atoda, Nobufumi ; Tanino, Hiroshi ; Ichimura, Shingo ; Onuki, Hideo. / LITHOGRAPHY EXPERIMENTS USING SYNCHROTRON RADIATION FROM ETL STORAGE RING. 2 p.
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AU - Onuki, Hideo

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