Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate

Junki Hayashi, Masashi Suzuki, Toshifumi Yonai, Kosuke Yamaya, Shoji Kakio, Kazuhito Kishida, Shiori Asakawa, Hiroyuki Kuwae, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation on the metallized surface of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz structure was calculated to be 0.0005 dB/1 at the normalized LT thin-plate thickness h/λ=0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-quartz structure. Using a finite element method (FEM) system, for the X31°Y-LT/X32°Y-Q model, the admittance ratio and Q factor were improved to 117 dB and 57,000 from 63 dB and 1,100 for the X31°Y-LT/AT45°X-Q model, respectively. On the basis of these results, several bonded samples were fabricated, and the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K2) and Q factor increased to 5.6% and 282 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency (TCF) of the LLSAW was measured to be -26.2 ppm/°C.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
Volume2018-October
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
CountryJapan
CityKobe
Period18/10/2218/10/25

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Keywords

  • bonded structure
  • longitudinal leaky SAW
  • quartz

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Hayashi, J., Suzuki, M., Yonai, T., Yamaya, K., Kakio, S., Kishida, K., Asakawa, S., Kuwae, H., & Mizuno, J. (2018). Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8579715] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579715