Abstract
To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1
| Original language | English |
|---|---|
| Article number | SGGC12 |
| Journal | Japanese journal of applied physics |
| Volume | 58 |
| Issue number | SG |
| DOIs | |
| Publication status | Published - 2019 Jan 1 |
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ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate. / Hayashi, Junki; Yamaya, Kosuke; Asakawa, Shiori; Suzuki, Masashi; Kakio, Shoji; Tezuka, Ami; Kuwae, Hiroyuki; Yonai, Toshifumi; Kishida, Kazuhito; Mizuno, Jun.
In: Japanese journal of applied physics, Vol. 58, No. SG, SGGC12, 01.01.2019.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate
AU - Hayashi, Junki
AU - Yamaya, Kosuke
AU - Asakawa, Shiori
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Tezuka, Ami
AU - Kuwae, Hiroyuki
AU - Yonai, Toshifumi
AU - Kishida, Kazuhito
AU - Mizuno, Jun
PY - 2019/1/1
Y1 - 2019/1/1
N2 - To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1
AB - To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1
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U2 - 10.7567/1347-4065/ab1132
DO - 10.7567/1347-4065/ab1132
M3 - Article
AN - SCOPUS:85072957151
VL - 58
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SG
M1 - SGGC12
ER -