Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate

Junki Hayashi, Kosuke Yamaya, Shiori Asakawa, Masashi Suzuki, Shoji Kakio, Ami Tezuka, Hiroyuki Kuwae, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

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Abstract

To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1

Original languageEnglish
Article numberSGGC12
JournalJapanese journal of applied physics
Volume58
Issue numberSG
DOIs
Publication statusPublished - 2019 Jan 1

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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