Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate

Junki Hayashi, Kosuke Yamaya, Shiori Asakawa, Masashi Suzuki, Shoji Kakio, Ami Tezuka, Hiroyuki Kuwae, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

Research output: Contribution to journalArticle

Abstract

To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1

Original languageEnglish
Article numberSGGC12
JournalJapanese journal of applied physics
Volume58
Issue numberSG
DOIs
Publication statusPublished - 2019 Jan 1

Fingerprint

thin plates
Surface waves
Quartz
Q factors
quartz
attenuation
Acoustic waves
Electromechanical coupling
propagation
acoustics
Substrates
electrical impedance
finite element method
Finite element method
Wavelength
coefficients
wavelengths
Temperature
temperature

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate. / Hayashi, Junki; Yamaya, Kosuke; Asakawa, Shiori; Suzuki, Masashi; Kakio, Shoji; Tezuka, Ami; Kuwae, Hiroyuki; Yonai, Toshifumi; Kishida, Kazuhito; Mizuno, Jun.

In: Japanese journal of applied physics, Vol. 58, No. SG, SGGC12, 01.01.2019.

Research output: Contribution to journalArticle

Hayashi, Junki ; Yamaya, Kosuke ; Asakawa, Shiori ; Suzuki, Masashi ; Kakio, Shoji ; Tezuka, Ami ; Kuwae, Hiroyuki ; Yonai, Toshifumi ; Kishida, Kazuhito ; Mizuno, Jun. / Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate. In: Japanese journal of applied physics. 2019 ; Vol. 58, No. SG.
@article{3899b66819064bfc843ed31ba7680993,
title = "Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate",
abstract = "To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6{\%} and 280 from 1.8{\%} and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1",
author = "Junki Hayashi and Kosuke Yamaya and Shiori Asakawa and Masashi Suzuki and Shoji Kakio and Ami Tezuka and Hiroyuki Kuwae and Toshifumi Yonai and Kazuhito Kishida and Jun Mizuno",
year = "2019",
month = "1",
day = "1",
doi = "10.7567/1347-4065/ab1132",
language = "English",
volume = "58",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "SG",

}

TY - JOUR

T1 - Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate

AU - Hayashi, Junki

AU - Yamaya, Kosuke

AU - Asakawa, Shiori

AU - Suzuki, Masashi

AU - Kakio, Shoji

AU - Tezuka, Ami

AU - Kuwae, Hiroyuki

AU - Yonai, Toshifumi

AU - Kishida, Kazuhito

AU - Mizuno, Jun

PY - 2019/1/1

Y1 - 2019/1/1

N2 - To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1

AB - To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) or LiNbO3 thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz (X32°Y-Q) was calculated to be 0.0005 dB/λ at the normalized LT thin plate thickness h/λ = 0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-Q. Using a finite element method, for the X31°Y-LT/X32°Y-Q, the admittance ratio and Q factor were improved to 120 dB and 53 400 from 62 dB and 1000 for the X31°Y-LT/AT45°X-Q, respectively. Then, the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2) and Q factor increased to 5.6% and 280 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency of the LLSAW was measured to be -26.2 ppm °C-1

UR - http://www.scopus.com/inward/record.url?scp=85072957151&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85072957151&partnerID=8YFLogxK

U2 - 10.7567/1347-4065/ab1132

DO - 10.7567/1347-4065/ab1132

M3 - Article

AN - SCOPUS:85072957151

VL - 58

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - SG

M1 - SGGC12

ER -