Low-pressure diamond nuclation and growth on cu substrate

Shin ichi Ojika, Satoshi Yamashita, Kazuhiro Kataoka, Takefumi Ishikura, Akira Yamaguchi, Hiroshi Kawarada

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We present a new technique for providing nuclei for diamond formation on nondiamond substrates and its application to the growth of diamond on a Cu substrate by chemical vapor deposition (CVD). This is a predeposition process in which the substrate is immersed in á CH4/H2 plasma formed by electron cyclotron resonance at a low pressure (0.1 Torr). The technique provides possibilities of nucléation over an increased area at temperatures lower (about 500°C) than usual, as well as improved process controllability. The grown diamonds on Cu exhibit a morphology significantly different from that of diamonds grown on Si.

Original languageEnglish
Pages (from-to)193-199
Number of pages7
JournalJapanese journal of applied physics
Volume32
Issue number2 A
DOIs
Publication statusPublished - 1993 Feb
Externally publishedYes

Keywords

  • Amorphous carbon
  • CVD
  • Copper
  • Crystal growth
  • Diamond
  • ECR plasma
  • Lowpressure
  • Nucl;ation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Low-pressure diamond nuclation and growth on cu substrate'. Together they form a unique fingerprint.

  • Cite this

    Ojika, S. I., Yamashita, S., Kataoka, K., Ishikura, T., Yamaguchi, A., & Kawarada, H. (1993). Low-pressure diamond nuclation and growth on cu substrate. Japanese journal of applied physics, 32(2 A), 193-199. https://doi.org/10.1143/JJAP.32.L200