Low-pressure diamond nucleation and growth on Cu substrate

Shin ichi Ojika, Satoshi Yamashita, Kazuhiro Kataoka, Takefumi Ishikura, Akira Yamaguchi, Hiroshi Kawarada

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We present a new technique for providing nuclei for diamond formation on nondiamond substrates and its application to the growth of diamond on a Cu substrate by chemical vapor deposition (CVD). This is a predeposition process in which the substrate is immersed in a CH4/H2 plasma formed by electron cyclotron resonance at a low pressure (0.1 Torr). The technique provides possibilities of nucleation over an increased area at temperatures lower (about 500°C) than usual, as well as improved process controllability. The grown diamonds on Cu exhibit a morphology significantly different from that of diamonds grown on Si.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume32
Issue number2 A
Publication statusPublished - 1993 Feb 1
Externally publishedYes

Fingerprint

Diamonds
Nucleation
low pressure
diamonds
nucleation
Substrates
Electron cyclotron resonance
controllability
electron cyclotron resonance
Controllability
Chemical vapor deposition
vapor deposition
Plasmas
nuclei
Temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Ojika, S. I., Yamashita, S., Kataoka, K., Ishikura, T., Yamaguchi, A., & Kawarada, H. (1993). Low-pressure diamond nucleation and growth on Cu substrate. Japanese Journal of Applied Physics, Part 2: Letters, 32(2 A).

Low-pressure diamond nucleation and growth on Cu substrate. / Ojika, Shin ichi; Yamashita, Satoshi; Kataoka, Kazuhiro; Ishikura, Takefumi; Yamaguchi, Akira; Kawarada, Hiroshi.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 32, No. 2 A, 01.02.1993.

Research output: Contribution to journalArticle

Ojika, SI, Yamashita, S, Kataoka, K, Ishikura, T, Yamaguchi, A & Kawarada, H 1993, 'Low-pressure diamond nucleation and growth on Cu substrate', Japanese Journal of Applied Physics, Part 2: Letters, vol. 32, no. 2 A.
Ojika SI, Yamashita S, Kataoka K, Ishikura T, Yamaguchi A, Kawarada H. Low-pressure diamond nucleation and growth on Cu substrate. Japanese Journal of Applied Physics, Part 2: Letters. 1993 Feb 1;32(2 A).
Ojika, Shin ichi ; Yamashita, Satoshi ; Kataoka, Kazuhiro ; Ishikura, Takefumi ; Yamaguchi, Akira ; Kawarada, Hiroshi. / Low-pressure diamond nucleation and growth on Cu substrate. In: Japanese Journal of Applied Physics, Part 2: Letters. 1993 ; Vol. 32, No. 2 A.
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