Low-temperature anodic bonding of silicon and crystal quartz wafers for MEMS application

Y. Zimin, T. Ueda

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    5 Citations (Scopus)

    Abstract

    Conventional fabrication of MEMS devices based on the quartz consists of a high tech processing of the very crystal with electrodes and subsequent manual assembling to the package. The limitation of the manual assembling could be eliminated through integration of the processing and packaging in a single high-tech process by means of silicon/crystal quartz bonding. New integrated technology would be able to create devices with new capabilities unobtainable with outdated technology. Low-temperature anodic bonding of silicon and quartz wafer appears to be the most promising method for elaboration of the unified technology. In this work, strong bonding of Si- and crystal quartz wafers close to the mechanical strength of the initial materials has been achieved as result of low-temperature annealing in electric field under pre-activation of crystal surfaces by oxygen plasma. Tensile test shows a disruptive stress of the samples at about 35 MPa. High bonding strength is associated with electric field applied during the annealing process. Similar bonding strength has been achieved for a pair of crystal quartz and structured silicon wafer with preetched micro cavities. Strong low-temperature bonding, including the bonding with pre-etched cavities, could be a key element of new technology of MEMS devices and provide new opportunities for miniaturization of sensors based on crystal quartz.

    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors
    Pages269-272
    Number of pages4
    DOIs
    Publication statusPublished - 2010
    Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI
    Duration: 2010 Nov 12010 Nov 4

    Other

    Other9th IEEE Sensors Conference 2010, SENSORS 2010
    CityWaikoloa, HI
    Period10/11/110/11/4

    Fingerprint

    MEMS
    Quartz
    Silicon
    Crystals
    Temperature
    Electric fields
    Annealing
    Processing
    Silicon wafers
    Strength of materials
    Packaging
    Chemical activation
    Plasmas
    Fabrication
    Electrodes
    Oxygen
    Sensors

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Zimin, Y., & Ueda, T. (2010). Low-temperature anodic bonding of silicon and crystal quartz wafers for MEMS application. In Proceedings of IEEE Sensors (pp. 269-272). [5689857] https://doi.org/10.1109/ICSENS.2010.5689857

    Low-temperature anodic bonding of silicon and crystal quartz wafers for MEMS application. / Zimin, Y.; Ueda, T.

    Proceedings of IEEE Sensors. 2010. p. 269-272 5689857.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Zimin, Y & Ueda, T 2010, Low-temperature anodic bonding of silicon and crystal quartz wafers for MEMS application. in Proceedings of IEEE Sensors., 5689857, pp. 269-272, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, 10/11/1. https://doi.org/10.1109/ICSENS.2010.5689857
    Zimin, Y. ; Ueda, T. / Low-temperature anodic bonding of silicon and crystal quartz wafers for MEMS application. Proceedings of IEEE Sensors. 2010. pp. 269-272
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