Low-temperature anodic bonding using lithium aluminosilicate-β-quartz glass ceramic

Shuichi Shoji, Hiroto Kikuchi, Hirotaka Torigoe

    Research output: Contribution to journalArticle

    51 Citations (Scopus)

    Abstract

    Silicon-to-glass anodic bonding is performed at temperatures below 180°C using lithium aluminosilicate-β-quartz glass ceramic. High alkaline ion mobility at low temperature, which is required for bonding, and thermal expansion coefficient matching to Si are realized by controlling the composition of the glass ceramic. Bonding is obtained at a lowest temperature of 140°C. Useful bonding conditions are temperature above 160°C (applied voltage above 500 V). Since the etch rate of the glass ceramic is five times higher than that of Pyrex glass in HF wet etching and the undercut is very small with a Cr-Au etch mask, three-dimensional structures are easily fabricated. Low-temperature anodic bonding using this type of glass ceramic is useful for the packaging and assembling of MEMS.

    Original languageEnglish
    Pages (from-to)95-100
    Number of pages6
    JournalSensors and Actuators, A: Physical
    Volume64
    Issue number1
    Publication statusPublished - 1998 Jan 1

    Fingerprint

    Quartz
    Aluminosilicates
    Glass ceramics
    Lithium
    quartz
    lithium
    ceramics
    glass
    Temperature
    Glass
    Wet etching
    Silicon
    MEMS
    borosilicate glass
    Thermal expansion
    Masks
    assembling
    Packaging
    packaging
    microelectromechanical systems

    Keywords

    • Anodic bonding
    • Glass ceramic
    • Low-temperature bonding
    • Micro assembly
    • Micro package

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Instrumentation

    Cite this

    Low-temperature anodic bonding using lithium aluminosilicate-β-quartz glass ceramic. / Shoji, Shuichi; Kikuchi, Hiroto; Torigoe, Hirotaka.

    In: Sensors and Actuators, A: Physical, Vol. 64, No. 1, 01.01.1998, p. 95-100.

    Research output: Contribution to journalArticle

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