TY - JOUR
T1 - Low-temperature Au-Au bonding using nanoporous Au-Ag sheets
AU - Mimatsu, Hayata
AU - Mizuno, Jun
AU - Kasahara, Takashi
AU - Saito, Mikiko
AU - Nishikawa, Hiroshi
AU - Shoji, Shuichi
PY - 2013/5
Y1 - 2013/5
N2 - In this study, we proposed low-temperature Au-Au bonding using nanoporous Au-Ag sheets, fabricated by dealloying a Au-Ag sheet in HNO3 solution, as a joint layer. The influence of the annealing temperature on the pore structure and chemical properties of the sheets was investigated. The chemical composition of the sheet was analyzed by X-ray photoelectron spectroscopy (XPS). It was found that the strength of Au-Au bonding with the nanoporous sheet increased. A sheet treated with liquid N2 was also tested; the strength of the Au-Au bond increased as a result of this low-temperature treatment.
AB - In this study, we proposed low-temperature Au-Au bonding using nanoporous Au-Ag sheets, fabricated by dealloying a Au-Ag sheet in HNO3 solution, as a joint layer. The influence of the annealing temperature on the pore structure and chemical properties of the sheets was investigated. The chemical composition of the sheet was analyzed by X-ray photoelectron spectroscopy (XPS). It was found that the strength of Au-Au bonding with the nanoporous sheet increased. A sheet treated with liquid N2 was also tested; the strength of the Au-Au bond increased as a result of this low-temperature treatment.
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U2 - 10.7567/JJAP.52.050204
DO - 10.7567/JJAP.52.050204
M3 - Article
AN - SCOPUS:84880893763
SN - 0021-4922
VL - 52
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 5 PART 1
M1 - 050204
ER -