Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration

Akiko Okada, Masatsugu Nimura, Naoko Unami, Akitsu Shigetou, Hirokazu Noma, Katsuyuki Sakuma, Shuichi Shoji, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes low temperature Au-Au bonding with vacuum ultraviolet (VUV) irradiation in the presence of oxygen gas. The VUV/O 3 treatment can remove organic contaminants without damages. The Au-Au bonding with VUV/O 3 treatment was achieved at 200 °C. The average shear strength was about 80 MPa per unit area. Therefore, it was proved that VUV/O 3 treatment is effective in Au-Au bonding.

Original languageEnglish
Title of host publicationProceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012
Pages171
Number of pages1
DOIs
Publication statusPublished - 2012
Event2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012 - Tokyo
Duration: 2012 May 222012 May 23

Other

Other2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012
CityTokyo
Period12/5/2212/5/23

Fingerprint

Vacuum
Temperature
Shear strength
Irradiation
Impurities
Oxygen
Gases

ASJC Scopus subject areas

  • Computer Graphics and Computer-Aided Design
  • Computer Vision and Pattern Recognition

Cite this

Okada, A., Nimura, M., Unami, N., Shigetou, A., Noma, H., Sakuma, K., ... Mizuno, J. (2012). Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration. In Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012 (pp. 171). [6238082] https://doi.org/10.1109/LTB-3D.2012.6238082

Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration. / Okada, Akiko; Nimura, Masatsugu; Unami, Naoko; Shigetou, Akitsu; Noma, Hirokazu; Sakuma, Katsuyuki; Shoji, Shuichi; Mizuno, Jun.

Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. 2012. p. 171 6238082.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Okada, A, Nimura, M, Unami, N, Shigetou, A, Noma, H, Sakuma, K, Shoji, S & Mizuno, J 2012, Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration. in Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012., 6238082, pp. 171, 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012, Tokyo, 12/5/22. https://doi.org/10.1109/LTB-3D.2012.6238082
Okada A, Nimura M, Unami N, Shigetou A, Noma H, Sakuma K et al. Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration. In Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. 2012. p. 171. 6238082 https://doi.org/10.1109/LTB-3D.2012.6238082
Okada, Akiko ; Nimura, Masatsugu ; Unami, Naoko ; Shigetou, Akitsu ; Noma, Hirokazu ; Sakuma, Katsuyuki ; Shoji, Shuichi ; Mizuno, Jun. / Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration. Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. 2012. pp. 171
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