Fingerprint
Dive into the research topics of 'Low temperature copper-copper quasi-direct bonding with ultrathin platinum intermediate layer using atomic layer deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Low temperature copper-copper quasi-direct bonding with ultrathin platinum intermediate layer using atomic layer deposition
Kosuke Yamada*, Hiroyuki Kuwae, Takumi Kamibayashi, Wataru Momose, Shuichi Shoji, Jun Mizuno
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)