Low-temperature crystallization induced by excimer laser irradiation of SrBi2Ta2O9 films

Kwang Soo Seol, Hironao Hiramatsu, Yoshimichi Ohki, In Hoon Choi, Yong Tea Kim

    Research output: Contribution to journalArticle

    9 Citations (Scopus)

    Abstract

    Transition of a SrBi2Ta2O9 precursor film from amorphous to crystalline was induced by excimer laser irradiation. Both fluorite and perovskite crystalline structures in such films were obtained by excimer laser irradiation at substrate temperatures between 200 and 500 °C. Either an addition of excess bismuth in the precursor film or an increase in the substrate temperature enhanced the formation of the perovskite structure in the excimer laser-induced annealing process, resulting in the perovskite crystalline phase at a relatively lower temperature of 500 °C. Such a low temperature is preferred when SrBi2Ta2O9 is used in ferroelectric devices. The mechanism involved in this laser-induced crystallization is also discussed.

    Original languageEnglish
    Pages (from-to)1883-1886
    Number of pages4
    JournalJournal of Materials Research
    Volume16
    Issue number7
    Publication statusPublished - 2001 Jul

    Fingerprint

    Excimer lasers
    Laser beam effects
    Crystallization
    excimer lasers
    Perovskite
    crystallization
    irradiation
    Crystalline materials
    Ferroelectric devices
    fluorite
    Temperature
    bismuth
    Bismuth
    Fluorspar
    Substrates
    annealing
    temperature
    Annealing
    lasers
    Lasers

    ASJC Scopus subject areas

    • Materials Science(all)

    Cite this

    Low-temperature crystallization induced by excimer laser irradiation of SrBi2Ta2O9 films. / Seol, Kwang Soo; Hiramatsu, Hironao; Ohki, Yoshimichi; Choi, In Hoon; Kim, Yong Tea.

    In: Journal of Materials Research, Vol. 16, No. 7, 07.2001, p. 1883-1886.

    Research output: Contribution to journalArticle

    Seol, KS, Hiramatsu, H, Ohki, Y, Choi, IH & Kim, YT 2001, 'Low-temperature crystallization induced by excimer laser irradiation of SrBi2Ta2O9 films', Journal of Materials Research, vol. 16, no. 7, pp. 1883-1886.
    Seol, Kwang Soo ; Hiramatsu, Hironao ; Ohki, Yoshimichi ; Choi, In Hoon ; Kim, Yong Tea. / Low-temperature crystallization induced by excimer laser irradiation of SrBi2Ta2O9 films. In: Journal of Materials Research. 2001 ; Vol. 16, No. 7. pp. 1883-1886.
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    AU - Choi, In Hoon

    AU - Kim, Yong Tea

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