Low-temperature direct bonding of poly(methyl methacrylate) for polymer microchips

Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume2
Issue number3
DOIs
Publication statusPublished - 2007 May

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Polymethyl methacrylates
Polymers
Temperature
Ultraviolet Rays

Keywords

  • Direct bonding
  • Hot-embossing
  • Oxygen plasma
  • PMMA microchip
  • Ultraviolet light
  • Vacuum ultraviolet light

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

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title = "Low-temperature direct bonding of poly(methyl methacrylate) for polymer microchips",
keywords = "Direct bonding, Hot-embossing, Oxygen plasma, PMMA microchip, Ultraviolet light, Vacuum ultraviolet light",
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AU - Shoji, Shuichi

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KW - Oxygen plasma

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KW - Ultraviolet light

KW - Vacuum ultraviolet light

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