Low-temperature direct bonding of poly(methyl methacrylate) for polymer microchips

Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)xv-xvi
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume2
Issue number3
DOIs
Publication statusPublished - 2007 May

Keywords

  • Direct bonding
  • Hot-embossing
  • Oxygen plasma
  • PMMA microchip
  • Ultraviolet light
  • Vacuum ultraviolet light

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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