Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing

Daisuke Yokoyama, Takayuki Iwasaki, Tsuyoshi Yoshida, Hiroshi Kawarada, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano

    Research output: Contribution to journalArticle

    101 Citations (Scopus)

    Abstract

    Vertically aligned multiwalled carbon nanotubes (MWCNTs) were synthesized by remote plasma chemical vapor deposition at a low temperature of 390 °C, which meets the requirement of the large scale integration (LSI) process. For wiring application, we measured the electrical properties of MWCNT-via structures with and without chemical mechanical polishing (CMP). The via resistances were reduced using inner shells of MWCNTs whose caps were opened due to CMP. The improved resistance after annealing at 400 °C was 0.6 for 2 μm vias. Our process is suitable for LSI because the temperature never exceeds the allowable temperature of 400 °C in the Si LSI process.

    Original languageEnglish
    Article number263101
    JournalApplied Physics Letters
    Volume91
    Issue number26
    DOIs
    Publication statusPublished - 2007

    Fingerprint

    large scale integration
    polishing
    carbon nanotubes
    wiring
    caps
    electrical properties
    vapor deposition
    requirements
    annealing
    temperature

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing. / Yokoyama, Daisuke; Iwasaki, Takayuki; Yoshida, Tsuyoshi; Kawarada, Hiroshi; Sato, Shintaro; Hyakushima, Takashi; Nihei, Mizuhisa; Awano, Yuji.

    In: Applied Physics Letters, Vol. 91, No. 26, 263101, 2007.

    Research output: Contribution to journalArticle

    Yokoyama, D, Iwasaki, T, Yoshida, T, Kawarada, H, Sato, S, Hyakushima, T, Nihei, M & Awano, Y 2007, 'Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing', Applied Physics Letters, vol. 91, no. 26, 263101. https://doi.org/10.1063/1.2824390
    Yokoyama, Daisuke ; Iwasaki, Takayuki ; Yoshida, Tsuyoshi ; Kawarada, Hiroshi ; Sato, Shintaro ; Hyakushima, Takashi ; Nihei, Mizuhisa ; Awano, Yuji. / Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing. In: Applied Physics Letters. 2007 ; Vol. 91, No. 26.
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    AU - Sato, Shintaro

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