Low-temperature growth of vertically aligned single-walled carbon nanotubes by radical CVD

Takayuki Iwasaki, Goufang Zhong, Hiroshi Kawarada

    Research output: Contribution to journalArticle

    4 Citations (Scopus)

    Abstract

    Very dense and vertically aligned single-walled carbon nanotubes (SWNTs) were synthesized using a radical CVD apparatus at a low temperature of 600°C. A high density of catalytic particles, which is necessary for the growth of vertically aligned SWNTs, was prepared by heat treatment of a sandwich-like catalyst structure of Al2O3 / Fe / Al 2O3. In our CVD apparatus, a sphere-shaped microwave plasma ball was fixed at the antenna in the chamber and was 50 mm away from the substrate, which indicates that ions cannot contribute to the growth of SWNTs. The radical CVD system produced a very long catalyst lifetime of over 30 h, because catalysts were not damaged and etched by ions. Using the catalysts with the long lifetime, lengths of SWNTs increased to millimeter order. Root growth mode of SWNTs was clarified by marker growth, which synthesized two vertically aligned SWNT layers on a substrate at different growth times.

    Original languageEnglish
    Pages (from-to)177-184
    Number of pages8
    JournalNew Diamond and Frontier Carbon Technology
    Volume16
    Issue number3
    Publication statusPublished - 2006

    Fingerprint

    Growth temperature
    Single-walled carbon nanotubes (SWCN)
    Chemical vapor deposition
    carbon nanotubes
    vapor deposition
    catalysts
    Catalysts
    Ions
    life (durability)
    Substrates
    markers
    balls
    ions
    heat treatment
    antennas
    chambers
    Heat treatment
    Microwaves
    Antennas
    Plasmas

    Keywords

    • Low temperature
    • Radical CVD
    • Single-walled carbon nanotube
    • Vertically aligned

    ASJC Scopus subject areas

    • Surfaces, Coatings and Films
    • Surfaces and Interfaces
    • Materials Science(all)

    Cite this

    Low-temperature growth of vertically aligned single-walled carbon nanotubes by radical CVD. / Iwasaki, Takayuki; Zhong, Goufang; Kawarada, Hiroshi.

    In: New Diamond and Frontier Carbon Technology, Vol. 16, No. 3, 2006, p. 177-184.

    Research output: Contribution to journalArticle

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