MASS- AND ELECTRON-SPECTROSCOPIC OBSERVATION OF RESIST DECOMPOSITION BY SYNCHROTRON RADIATION.

Shingo Ichimura, Masahiro Hirata, Hiroshi Tanino, Nobufumi Atoda, Koichiro Hoh, Masatoshi Ono

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Analytical techniques of mass- and electron-spectroscopy were applied to the observation of lithography by synchrotron radiation (SR). During the exposure of positive resist to SR, the tendency of side-chain components easily dissociating was shown by mass spectroscopy. In-situ analysis with electron spectroscopy showed that the height of a peak appearing at low energy increased during the exposure when the power density of SR was high. This increase was closely related to the reduction in the film thickness by SR due to the dissociation of constituent molecules of the resist.

Original languageEnglish
Pages (from-to)406-408
Number of pages3
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume22
Issue number7
Publication statusPublished - 1983 Jan 1
Externally publishedYes

Fingerprint

Synchrotron radiation
synchrotron radiation
Decomposition
decomposition
Electron spectroscopy
Electrons
electron spectroscopy
electrons
mass spectroscopy
Lithography
Film thickness
radiant flux density
tendencies
film thickness
lithography
Spectroscopy
dissociation
Molecules
molecules
energy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

MASS- AND ELECTRON-SPECTROSCOPIC OBSERVATION OF RESIST DECOMPOSITION BY SYNCHROTRON RADIATION. / Ichimura, Shingo; Hirata, Masahiro; Tanino, Hiroshi; Atoda, Nobufumi; Hoh, Koichiro; Ono, Masatoshi.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 22, No. 7, 01.01.1983, p. 406-408.

Research output: Contribution to journalArticle

Ichimura, Shingo ; Hirata, Masahiro ; Tanino, Hiroshi ; Atoda, Nobufumi ; Hoh, Koichiro ; Ono, Masatoshi. / MASS- AND ELECTRON-SPECTROSCOPIC OBSERVATION OF RESIST DECOMPOSITION BY SYNCHROTRON RADIATION. In: Japanese Journal of Applied Physics, Part 2: Letters. 1983 ; Vol. 22, No. 7. pp. 406-408.
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