Abstract
A simple model is used to study the dependence of the sputtering yield on the incident atomic number (Z1). Scatterings between incident and target atoms are classified into two types, that is, large and small angle scatterings. Large angle scatterings are represented by random walks with a certain energy loss and small angle scatterings by another certain energy loss. The range distribution derived from this model is compared with other rigorous calculations. Sigmund's theory considerably overestimates the sputtering yield in the region where M2≫M1, M1 and M2 the mass of incident and target atoms respectively. Our simple model explains this as a surface boundary effect, i.e., as an effect due to escaping of energetic atoms from the surface.
| Original language | English |
|---|---|
| Pages (from-to) | 1957-1964 |
| Number of pages | 8 |
| Journal | Journal of the Physical Society of Japan |
| Volume | 45 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1978 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Mass Dependence of the Sputtering Yield —Boundary Effect. / Imada, Masatoshi.
In: Journal of the Physical Society of Japan, Vol. 45, No. 6, 01.01.1978, p. 1957-1964.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Mass Dependence of the Sputtering Yield —Boundary Effect
AU - Imada, Masatoshi
PY - 1978/1/1
Y1 - 1978/1/1
N2 - A simple model is used to study the dependence of the sputtering yield on the incident atomic number (Z1). Scatterings between incident and target atoms are classified into two types, that is, large and small angle scatterings. Large angle scatterings are represented by random walks with a certain energy loss and small angle scatterings by another certain energy loss. The range distribution derived from this model is compared with other rigorous calculations. Sigmund's theory considerably overestimates the sputtering yield in the region where M2≫M1, M1 and M2 the mass of incident and target atoms respectively. Our simple model explains this as a surface boundary effect, i.e., as an effect due to escaping of energetic atoms from the surface.
AB - A simple model is used to study the dependence of the sputtering yield on the incident atomic number (Z1). Scatterings between incident and target atoms are classified into two types, that is, large and small angle scatterings. Large angle scatterings are represented by random walks with a certain energy loss and small angle scatterings by another certain energy loss. The range distribution derived from this model is compared with other rigorous calculations. Sigmund's theory considerably overestimates the sputtering yield in the region where M2≫M1, M1 and M2 the mass of incident and target atoms respectively. Our simple model explains this as a surface boundary effect, i.e., as an effect due to escaping of energetic atoms from the surface.
UR - http://www.scopus.com/inward/record.url?scp=77952996045&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77952996045&partnerID=8YFLogxK
U2 - 10.1143/JPSJ.45.1957
DO - 10.1143/JPSJ.45.1957
M3 - Article
AN - SCOPUS:77952996045
VL - 45
SP - 1957
EP - 1964
JO - Journal of the Physical Society of Japan
JF - Journal of the Physical Society of Japan
SN - 0031-9015
IS - 6
ER -