Abstract
We grow GaN on MgO substrate by plasma-assisted molecular beam epitaxy (MBE). It is revealed that hexagonal GaN grows on (1 1 1) MgO substrate and cubic GaN grows on (0 0 1) MgO substrate according to the symmetry of the substrates. Mixture of hexagonal phase into cubic GaN is found to be formed in the growth on (0 0 1) MgO, and is investigated by reciprocal space mapping. We obtained GaN epitaxial films with flat surface morphology and good crystalline quality on (1 1 1) MgO substrate.
Original language | English |
---|---|
Pages (from-to) | 478-481 |
Number of pages | 4 |
Journal | Journal of Crystal Growth |
Volume | 301-302 |
Issue number | SPEC. ISS. |
DOIs | |
Publication status | Published - 2007 Apr |
Keywords
- A1. Crystal structure
- A1. Photoluminescence
- A1. X-ray diffraction
- A3. Molecular beam epitaxy
- B1. Nitrides
- B2. Semiconducting gallium compounds
ASJC Scopus subject areas
- Condensed Matter Physics