Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun, Shingo Ichimura, Shigeyuki Sekine, Hazime Shimizu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

Original languageEnglish
Pages (from-to)L1109-L1111
JournalJapanese journal of applied physics
Volume32
Issue number8 A
DOIs
Publication statusPublished - 1993 Aug
Externally publishedYes

Keywords

  • H
  • Laser ionization
  • Pressure measurement
  • XHV

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Measurement of extreme-high-vacuum pressure by laser ionization'. Together they form a unique fingerprint.

  • Cite this