Measurement of extreme-high-vacuum pressure by laser ionization

Kiyohide Kokubun, Shingo Ichimura, Shigeyuki Sekine, Hazime Shimizu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Measurement of gas pressure using nonresonant multiphoton ionization has been performed. As a result, ex-treme-high-vacuum (XHV) pressure to 7 x 10-10Pa was successfully measured by this method. The experimental results are presented, and problems related to noise are discussed.

Original languageEnglish
Pages (from-to)L1109-L1111
JournalJapanese Journal of Applied Physics
Volume32
Issue number8 A
DOIs
Publication statusPublished - 1993 Jan 1
Externally publishedYes

Fingerprint

high vacuum
Ionization
gas pressure
Vacuum
ionization
Lasers
lasers
Gases

Keywords

  • H
  • Laser ionization
  • Pressure measurement
  • XHV

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Measurement of extreme-high-vacuum pressure by laser ionization. / Kokubun, Kiyohide; Ichimura, Shingo; Sekine, Shigeyuki; Shimizu, Hazime.

In: Japanese Journal of Applied Physics, Vol. 32, No. 8 A, 01.01.1993, p. L1109-L1111.

Research output: Contribution to journalArticle

Kokubun, Kiyohide ; Ichimura, Shingo ; Sekine, Shigeyuki ; Shimizu, Hazime. / Measurement of extreme-high-vacuum pressure by laser ionization. In: Japanese Journal of Applied Physics. 1993 ; Vol. 32, No. 8 A. pp. L1109-L1111.
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