Measurement of nanometer electron beam sizes using laser interference by Shintake Monitor

Jacqueline Yan*, Yoshio Kamiya, Sachio Komamiya, Toshiyuki Okugi, Nobuhiro Terunuma, Kiyoshi Kubo, Toshiaki Tauchi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science