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Measurement of nanometer electron beam sizes using laser interference by Shintake Monitor
Jacqueline Yan*, Yoshio Kamiya, Sachio Komamiya, Toshiyuki Okugi, Nobuhiro Terunuma, Kiyoshi Kubo, Toshiaki Tauchi
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review