Fingerprint
Dive into the research topics of 'Measurement of nanometer electron beam sizes with laser interference using Shintake Monitor'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Measurement of nanometer electron beam sizes with laser interference using Shintake Monitor
Jacqueline Yan*, Yohei Yamaguchi, Yoshio Kamiya, Sachio Komamiya, Masahiro Oroku, Toshiyuki Okugi, Nobuhiro Terunuma, Kiyoshi Kubo, Toshiaki Tauchi, Junji Urakawa
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)