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Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region
Shingo Ichimura, Kiyohide Kokubun, Masahiro Hirata, Sonoko Tsukahara, Kzuya Saito, Yoshinao Ikeda
Research output: Contribution to journal › Conference article › peer-review
13
Citations
(Scopus)