Abstract
This paper reports on the fabrication and characterization of MEMS-scale devices from a mechanically dynamic polymer nanocomposite, consisting of a cotton-derived cellulose nanofibers encased in a poly(vinyl acetate) matrix, with a stiffness modulated by the presence or absence of water. Microtensile testing showed that the Young's modulus (E) of the nanocomposite is initially ∼2.7 GPa, but reduces to ∼4 MPa upon immersion in water for 7 minutes. A combination of laser-micromachining and lithographic processing was used to produce an intracortical probe with switchable stiffness based on the dynamic nanocomposite. An electrode with area 2800 μm2 was found to have an impedance of 156 kΩ at 1 kHz. This investigation was the first time that a chemoresponsive nanocomposite based on cotton cellulose nanofibers was used in MEMS-scale structures.
Original language | English |
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Title of host publication | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
Pages | 453-456 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2011 |
Externally published | Yes |
Event | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun Duration: 2011 Jan 23 → 2011 Jan 27 |
Other
Other | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
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City | Cancun |
Period | 11/1/23 → 11/1/27 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials