Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation

Y. Arai, Yoshimichi Ohki, K. Saito, H. Nishikawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He + ions or 1.0-MeV H + ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 10 16 cm -2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He + ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 %. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 %, induced by the irradiation of H + ions to the fluence of 1 × 10 15 cm -2 is comparable to the value, 0.35 %, observed when H + ions of a similar fluence were irradiated to SiO 2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.

    Original languageEnglish
    Title of host publicationAnnual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP
    Pages705-708
    Number of pages4
    DOIs
    Publication statusPublished - 2012
    Event2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012 - Montreal, QC, Canada
    Duration: 2012 Oct 142012 Oct 17

    Other

    Other2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012
    CountryCanada
    CityMontreal, QC
    Period12/10/1412/10/17

    Fingerprint

    Ion bombardment
    Polyimides
    Refractive index
    Ions
    Polymers
    Optical waveguides
    Irradiation
    Spectroscopic ellipsometry
    Glass

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

    Cite this

    Arai, Y., Ohki, Y., Saito, K., & Nishikawa, H. (2012). Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. In Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP (pp. 705-708). [6378878] https://doi.org/10.1109/CEIDP.2012.6378878

    Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. / Arai, Y.; Ohki, Yoshimichi; Saito, K.; Nishikawa, H.

    Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. p. 705-708 6378878.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Arai, Y, Ohki, Y, Saito, K & Nishikawa, H 2012, Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. in Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP., 6378878, pp. 705-708, 2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012, Montreal, QC, Canada, 12/10/14. https://doi.org/10.1109/CEIDP.2012.6378878
    Arai Y, Ohki Y, Saito K, Nishikawa H. Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. In Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. p. 705-708. 6378878 https://doi.org/10.1109/CEIDP.2012.6378878
    Arai, Y. ; Ohki, Yoshimichi ; Saito, K. ; Nishikawa, H. / Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. pp. 705-708
    @inproceedings{8cfa51bac4864683aebbde890e850375,
    title = "Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation",
    abstract = "This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He + ions or 1.0-MeV H + ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 10 16 cm -2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He + ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 {\%}. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 {\%}, induced by the irradiation of H + ions to the fluence of 1 × 10 15 cm -2 is comparable to the value, 0.35 {\%}, observed when H + ions of a similar fluence were irradiated to SiO 2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.",
    author = "Y. Arai and Yoshimichi Ohki and K. Saito and H. Nishikawa",
    year = "2012",
    doi = "10.1109/CEIDP.2012.6378878",
    language = "English",
    pages = "705--708",
    booktitle = "Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP",

    }

    TY - GEN

    T1 - Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation

    AU - Arai, Y.

    AU - Ohki, Yoshimichi

    AU - Saito, K.

    AU - Nishikawa, H.

    PY - 2012

    Y1 - 2012

    N2 - This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He + ions or 1.0-MeV H + ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 10 16 cm -2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He + ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 %. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 %, induced by the irradiation of H + ions to the fluence of 1 × 10 15 cm -2 is comparable to the value, 0.35 %, observed when H + ions of a similar fluence were irradiated to SiO 2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.

    AB - This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He + ions or 1.0-MeV H + ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 10 16 cm -2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He + ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 %. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 %, induced by the irradiation of H + ions to the fluence of 1 × 10 15 cm -2 is comparable to the value, 0.35 %, observed when H + ions of a similar fluence were irradiated to SiO 2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.

    UR - http://www.scopus.com/inward/record.url?scp=84872092334&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84872092334&partnerID=8YFLogxK

    U2 - 10.1109/CEIDP.2012.6378878

    DO - 10.1109/CEIDP.2012.6378878

    M3 - Conference contribution

    SP - 705

    EP - 708

    BT - Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP

    ER -