Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform

Tatsurou Hiraki, Takuma Aihara, Koji Takeda, Takuro Fujii, Takaaki Kakitsuka, Tai Tsuchizawa, Hiroshi Fukuda, Shinji Matsuo

Research output: Contribution to journalArticle

Abstract

A high-efficiency InGaAsP Mach-Zehnder modulator is integrated with hydrogen-free deuterated silicon nitride (SiN:D) waveguide circuits on a Si substrate. A thin InP-based layer provides a high optical confinement factor of around 50% and enables easy optical coupling to the SiN:D waveguides, which are fabricated by a low-temperature backend process. The fabricated Mach-Zehnder modulator with a 300-μm-long phase shifter shows a VπL of 0.4 Vcm, insertion loss of ~4.5 dB, and an error-free operation for 40-Gbit/s non-return-to-zero signal.

Original languageEnglish
Pages (from-to)18612-18619
Number of pages8
JournalOptics Express
Volume27
Issue number13
DOIs
Publication statusPublished - 2019 Jan 1

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silicon nitrides
modulators
platforms
membranes
waveguides
optical coupling
insertion loss
hydrogen

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Hiraki, T., Aihara, T., Takeda, K., Fujii, T., Kakitsuka, T., Tsuchizawa, T., ... Matsuo, S. (2019). Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. Optics Express, 27(13), 18612-18619. https://doi.org/10.1364/OE.27.018612

Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. / Hiraki, Tatsurou; Aihara, Takuma; Takeda, Koji; Fujii, Takuro; Kakitsuka, Takaaki; Tsuchizawa, Tai; Fukuda, Hiroshi; Matsuo, Shinji.

In: Optics Express, Vol. 27, No. 13, 01.01.2019, p. 18612-18619.

Research output: Contribution to journalArticle

Hiraki, T, Aihara, T, Takeda, K, Fujii, T, Kakitsuka, T, Tsuchizawa, T, Fukuda, H & Matsuo, S 2019, 'Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform', Optics Express, vol. 27, no. 13, pp. 18612-18619. https://doi.org/10.1364/OE.27.018612
Hiraki T, Aihara T, Takeda K, Fujii T, Kakitsuka T, Tsuchizawa T et al. Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. Optics Express. 2019 Jan 1;27(13):18612-18619. https://doi.org/10.1364/OE.27.018612
Hiraki, Tatsurou ; Aihara, Takuma ; Takeda, Koji ; Fujii, Takuro ; Kakitsuka, Takaaki ; Tsuchizawa, Tai ; Fukuda, Hiroshi ; Matsuo, Shinji. / Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. In: Optics Express. 2019 ; Vol. 27, No. 13. pp. 18612-18619.
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