Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform

Tatsurou Hiraki; Takuma Aihara; Koji Takeda; Takuro Fujii; Takaaki Kakitsuka; Tai Tsuchizawa; Hiroshi Fukuda; Shinji Matsuo

doi:10.1364/OE.27.018612

Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform

Tatsurou Hiraki, Takuma Aihara, Koji Takeda, Takuro Fujii, Takaaki Kakitsuka, Tai Tsuchizawa, Hiroshi Fukuda, Shinji Matsuo

Graduate School of Information, Production and Systems

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

A high-efficiency InGaAsP Mach-Zehnder modulator is integrated with hydrogen-free deuterated silicon nitride (SiN:D) waveguide circuits on a Si substrate. A thin InP-based layer provides a high optical confinement factor of around 50% and enables easy optical coupling to the SiN:D waveguides, which are fabricated by a low-temperature backend process. The fabricated Mach-Zehnder modulator with a 300-μm-long phase shifter shows a V_πL of 0.4 Vcm, insertion loss of ~4.5 dB, and an error-free operation for 40-Gbit/s non-return-to-zero signal.

Original language	English
Pages (from-to)	18612-18619
Number of pages	8
Journal	Optics Express
Volume	27
Issue number	13
DOIs	https://doi.org/10.1364/OE.27.018612
Publication status	Published - 2019 Jan 1

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ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Cite this

Hiraki, T., Aihara, T., Takeda, K., Fujii, T., Kakitsuka, T., Tsuchizawa, T., Fukuda, H., & Matsuo, S. (2019). Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform. Optics Express, 27(13), 18612-18619. https://doi.org/10.1364/OE.27.018612

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abstract = "A high-efficiency InGaAsP Mach-Zehnder modulator is integrated with hydrogen-free deuterated silicon nitride (SiN:D) waveguide circuits on a Si substrate. A thin InP-based layer provides a high optical confinement factor of around 50% and enables easy optical coupling to the SiN:D waveguides, which are fabricated by a low-temperature backend process. The fabricated Mach-Zehnder modulator with a 300-μm-long phase shifter shows a VπL of 0.4 Vcm, insertion loss of ~4.5 dB, and an error-free operation for 40-Gbit/s non-return-to-zero signal.",

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AU - Fujii, Takuro

AU - Kakitsuka, Takaaki

AU - Tsuchizawa, Tai

AU - Fukuda, Hiroshi

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Access to Document

10.1364/OE.27.018612