Membrane sieve using stoichiometric and stress-reduced SiN/SiO/SiN multilayer films and applications to plasma separation

Dae Sik Lee*, Yo Han Choi, Mun Yeon Jun, Yong Duk Han, Hyun C. Yoon, Shuichi Shoji

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Engineering & Materials Science