MEMS fabricated liquid chromatography microchip for practical uses

Masao Noguchi; Makoto Tsunoda; Jun Mizuno; Takashi Funatsu; Shuichi Shoji

doi:10.1109/MEMSYS.2010.5442355

MEMS fabricated liquid chromatography microchip for practical uses

Masao Noguchi^*, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	911-914
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442355
Publication status	Published - 2010 Jun 1
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010 Jan 24 → 2010 Jan 28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2010.5442355

Cite this

Noguchi, M., Tsunoda, M., Mizuno, J., Funatsu, T., & Shoji, S. (2010). MEMS fabricated liquid chromatography microchip for practical uses. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 911-914). [5442355] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442355

MEMS fabricated liquid chromatography microchip for practical uses. / Noguchi, Masao; Tsunoda, Makoto; Mizuno, Jun et al.

MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 911-914 5442355 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Noguchi, M, Tsunoda, M, Mizuno, J, Funatsu, T & Shoji, S 2010, MEMS fabricated liquid chromatography microchip for practical uses. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442355, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 911-914, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442355

Noguchi M, Tsunoda M, Mizuno J, Funatsu T, Shoji S. MEMS fabricated liquid chromatography microchip for practical uses. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 911-914. 5442355. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442355

@inproceedings{4a502a8e870d4913a1b4c5810e2b1f22,

title = "MEMS fabricated liquid chromatography microchip for practical uses",

abstract = "A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.",

author = "Masao Noguchi and Makoto Tsunoda and Jun Mizuno and Takashi Funatsu and Shuichi Shoji",

year = "2010",

month = jun,

day = "1",

doi = "10.1109/MEMSYS.2010.5442355",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "911--914",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

TY - GEN

T1 - MEMS fabricated liquid chromatography microchip for practical uses

AU - Noguchi, Masao

AU - Tsunoda, Makoto

AU - Mizuno, Jun

AU - Funatsu, Takashi

AU - Shoji, Shuichi

PY - 2010/6/1

Y1 - 2010/6/1

N2 - A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

AB - A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

UR - http://www.scopus.com/inward/record.url?scp=77952764332&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77952764332&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442355

DO - 10.1109/MEMSYS.2010.5442355

M3 - Conference contribution

AN - SCOPUS:77952764332

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 911

EP - 914

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

MEMS fabricated liquid chromatography microchip for practical uses

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