MEMS fabricated liquid chromatography microchip for practical uses

Masao Noguchi, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages911-914
Number of pages4
DOIs
Publication statusPublished - 2010 Jun 1
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 2010 Jan 242010 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period10/1/2410/1/28

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Noguchi, M., Tsunoda, M., Mizuno, J., Funatsu, T., & Shoji, S. (2010). MEMS fabricated liquid chromatography microchip for practical uses. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 911-914). [5442355] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442355