MEMS fabricated liquid chromatography microchip for practical uses

Masao Noguchi, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency. The liquid chromatography (LC) microchip was fabricated on the 20 mm x 20 mm silicon chip using a column of 110 mm in length. The theoretical plate number is approximately 8000 (typical packed column: 5000-18000) and the plate heights are 10.4 ?m (typical packed column: 14-20 μm). These results show that the microfabricated LC microchip is suitable for practical uses.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages911-914
Number of pages4
DOIs
Publication statusPublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong
Duration: 2010 Jan 242010 Jan 28

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CityHong Kong
Period10/1/2410/1/28

Fingerprint

Liquid chromatography
liquid chromatography
microelectromechanical systems
MEMS
Silicon
Microchannels
chips
Geometry
silicon
microchannels
curves
geometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Noguchi, M., Tsunoda, M., Mizuno, J., Funatsu, T., & Shoji, S. (2010). MEMS fabricated liquid chromatography microchip for practical uses. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 911-914). [5442355] https://doi.org/10.1109/MEMSYS.2010.5442355

MEMS fabricated liquid chromatography microchip for practical uses. / Noguchi, Masao; Tsunoda, Makoto; Mizuno, Jun; Funatsu, Takashi; Shoji, Shuichi.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 911-914 5442355.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Noguchi, M, Tsunoda, M, Mizuno, J, Funatsu, T & Shoji, S 2010, MEMS fabricated liquid chromatography microchip for practical uses. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 5442355, pp. 911-914, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442355
Noguchi M, Tsunoda M, Mizuno J, Funatsu T, Shoji S. MEMS fabricated liquid chromatography microchip for practical uses. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 911-914. 5442355 https://doi.org/10.1109/MEMSYS.2010.5442355
Noguchi, Masao ; Tsunoda, Makoto ; Mizuno, Jun ; Funatsu, Takashi ; Shoji, Shuichi. / MEMS fabricated liquid chromatography microchip for practical uses. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. pp. 911-914
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