MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki; M. Isokawa; Y. Song; A. Nakahara; D. H. Yoon; T. Sekiguchi; J. Mizuno; T. Funatsu; M. Tsunoda; S. Shoji

doi:10.1109/MEMSYS.2013.6474411

MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki^*, M. Isokawa, Y. Song, A. Nakahara, D. H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	981-984
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474411
Publication status	Published - 2013 Apr 2
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 2013 Jan 20 → 2013 Jan 24

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	13/1/20 → 13/1/24

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2013.6474411

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Takatsuki, K., Isokawa, M., Song, Y., Nakahara, A., Yoon, D. H., Sekiguchi, T., Mizuno, J., Funatsu, T., Tsunoda, M., & Shoji, S. (2013). MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 981-984). [6474411] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474411

MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. / Takatsuki, K.; Isokawa, M.; Song, Y. et al.

IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 981-984 6474411 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takatsuki, K, Isokawa, M, Song, Y, Nakahara, A, Yoon, DH, Sekiguchi, T, Mizuno, J, Funatsu, T, Tsunoda, M & Shoji, S 2013, MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474411, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 981-984, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474411

Takatsuki K, Isokawa M, Song Y, Nakahara A, Yoon DH, Sekiguchi T et al. MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 981-984. 6474411. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474411

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title = "MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array",

abstract = "MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.",

author = "K. Takatsuki and M. Isokawa and Y. Song and A. Nakahara and Yoon, {D. H.} and T. Sekiguchi and J. Mizuno and T. Funatsu and M. Tsunoda and S. Shoji",

year = "2013",

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doi = "10.1109/MEMSYS.2013.6474411",

language = "English",

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series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "981--984",

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note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

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AU - Takatsuki, K.

AU - Isokawa, M.

AU - Song, Y.

AU - Nakahara, A.

AU - Yoon, D. H.

AU - Sekiguchi, T.

AU - Mizuno, J.

AU - Funatsu, T.

AU - Tsunoda, M.

AU - Shoji, S.

PY - 2013/4/2

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N2 - MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

AB - MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

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MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

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