MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki, M. Isokawa, Y. Song, A. Nakahara, Donghyun Yoon, Tetsushi Sekiguchi, Jun Mizuno, T. Funatsu, M. Tsunoda, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages981-984
Number of pages4
DOIs
Publication statusPublished - 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei
Duration: 2013 Jan 202013 Jan 24

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CityTaipei
Period13/1/2013/1/24

Fingerprint

Liquid chromatography
liquid chromatography
pressure drop
microelectromechanical systems
MEMS
Pressure drop
low pressure
flow velocity
Flow rate
inlet pressure
chips

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Takatsuki, K., Isokawa, M., Song, Y., Nakahara, A., Yoon, D., Sekiguchi, T., ... Shoji, S. (2013). MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 981-984). [6474411] https://doi.org/10.1109/MEMSYS.2013.6474411

MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. / Takatsuki, K.; Isokawa, M.; Song, Y.; Nakahara, A.; Yoon, Donghyun; Sekiguchi, Tetsushi; Mizuno, Jun; Funatsu, T.; Tsunoda, M.; Shoji, Shuichi.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2013. p. 981-984 6474411.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takatsuki, K, Isokawa, M, Song, Y, Nakahara, A, Yoon, D, Sekiguchi, T, Mizuno, J, Funatsu, T, Tsunoda, M & Shoji, S 2013, MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 6474411, pp. 981-984, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474411
Takatsuki K, Isokawa M, Song Y, Nakahara A, Yoon D, Sekiguchi T et al. MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2013. p. 981-984. 6474411 https://doi.org/10.1109/MEMSYS.2013.6474411
Takatsuki, K. ; Isokawa, M. ; Song, Y. ; Nakahara, A. ; Yoon, Donghyun ; Sekiguchi, Tetsushi ; Mizuno, Jun ; Funatsu, T. ; Tsunoda, M. ; Shoji, Shuichi. / MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2013. pp. 981-984
@inproceedings{2fd1a1eb22b34a38beaad49abc1d3fb0,
title = "MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array",
abstract = "MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.",
author = "K. Takatsuki and M. Isokawa and Y. Song and A. Nakahara and Donghyun Yoon and Tetsushi Sekiguchi and Jun Mizuno and T. Funatsu and M. Tsunoda and Shuichi Shoji",
year = "2013",
doi = "10.1109/MEMSYS.2013.6474411",
language = "English",
isbn = "9781467356558",
pages = "981--984",
booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

AU - Takatsuki, K.

AU - Isokawa, M.

AU - Song, Y.

AU - Nakahara, A.

AU - Yoon, Donghyun

AU - Sekiguchi, Tetsushi

AU - Mizuno, Jun

AU - Funatsu, T.

AU - Tsunoda, M.

AU - Shoji, Shuichi

PY - 2013

Y1 - 2013

N2 - MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

AB - MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

UR - http://www.scopus.com/inward/record.url?scp=84875479644&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84875479644&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2013.6474411

DO - 10.1109/MEMSYS.2013.6474411

M3 - Conference contribution

SN - 9781467356558

SP - 981

EP - 984

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -