MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki, M. Isokawa, Y. Song, A. Nakahara, D. H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

MEMS liquid chromatography (LC) microchip with low dispersion and a low pressure drop turn structure was fabricated. In the turn structure, we used higher density pillar array at the inner side while lower density pillar array was used at the outer side to control inner and outer speed of a sample flow. An LC chip with an improved turn structure can obtain similar theoretical plate number (1233) compared to the previously proposed tapered turn (1135). The necessary inlet pressure is also reduced from 2.7 to 0.4 MPa under a flow rate of 10 μL/min. These results show the improved turn structure is applicable for fast analysis time under high flow rate conditions.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages981-984
Number of pages4
DOIs
Publication statusPublished - 2013 Apr 2
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Takatsuki, K., Isokawa, M., Song, Y., Nakahara, A., Yoon, D. H., Sekiguchi, T., Mizuno, J., Funatsu, T., Tsunoda, M., & Shoji, S. (2013). MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 981-984). [6474411] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474411