MEMS LC microchip with low dispersion and low pressure drop turn structure using distribution controlled micro pillar array

K. Takatsuki, M. Isokawa, Y. Song, A. Nakahara, D. H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science