MEMS microphone with a micro Helmholtz resonator

Hidetoshi Takahashi, Akira Suzuki, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Research output: Contribution to journalArticle

    7 Citations (Scopus)

    Abstract

    This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm×1.2mm×0.6mm and 130m×40m×0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.

    Original languageEnglish
    Article number085019
    JournalJournal of Micromechanics and Microengineering
    Volume22
    Issue number8
    DOIs
    Publication statusPublished - 2012 Aug

    Fingerprint

    Microphones
    MEMS
    Resonators
    Ultrasonic waves
    Proximity sensors
    Ultrasonic sensors
    Sensors

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering
    • Mechanics of Materials
    • Electronic, Optical and Magnetic Materials

    Cite this

    MEMS microphone with a micro Helmholtz resonator. / Takahashi, Hidetoshi; Suzuki, Akira; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 8, 085019, 08.2012.

    Research output: Contribution to journalArticle

    Takahashi, Hidetoshi ; Suzuki, Akira ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / MEMS microphone with a micro Helmholtz resonator. In: Journal of Micromechanics and Microengineering. 2012 ; Vol. 22, No. 8.
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