Merged logic and DRAM

M. Inuishi*, B. Havemann, M. Yamawaki, S. Stiffler, C. Kim, N. Lu, D. Scott, O. Tomisawa, H. Ishiuchi, C. S. Choi, H. Kalter, F. Pollack, D. Puar

*Corresponding author for this work

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Engineering & Materials Science