Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC)

Hiroaki Houjou, Shinji Motokawa, Masanori Ishizuka, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical comer formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (μDMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm2 were obtained at room temperature with 2M methanol.

Original languageEnglish
Title of host publicationDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Pages1437-1440
Number of pages4
Volume2
DOIs
Publication statusPublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul
Duration: 2005 Jun 52005 Jun 9

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CitySeoul
Period05/6/505/6/9

Fingerprint

Direct methanol fuel cells (DMFC)
Metallizing
Coatings
Microstructure
Electrodes
Anisotropic etching
Wet etching
Reactive ion etching
Open circuit voltage
Photoresists
Methanol
Silicon
Metals
Temperature

Keywords

  • μDMFC
  • 3-D electrode
  • 3-D microfabrication
  • Fuel cell
  • Spray coating

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Houjou, H., Motokawa, S., Ishizuka, M., Mizuno, J., Momma, T., Osaka, T., & Shoji, S. (2005). Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC). In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 2, pp. 1437-1440). [3E4.35] https://doi.org/10.1109/SENSOR.2005.1497352

Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC). / Houjou, Hiroaki; Motokawa, Shinji; Ishizuka, Masanori; Mizuno, Jun; Momma, Toshiyuki; Osaka, Tetsuya; Shoji, Shuichi.

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. p. 1437-1440 3E4.35.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Houjou, H, Motokawa, S, Ishizuka, M, Mizuno, J, Momma, T, Osaka, T & Shoji, S 2005, Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC). in Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. vol. 2, 3E4.35, pp. 1437-1440, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497352
Houjou H, Motokawa S, Ishizuka M, Mizuno J, Momma T, Osaka T et al. Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC). In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2. 2005. p. 1437-1440. 3E4.35 https://doi.org/10.1109/SENSOR.2005.1497352
Houjou, Hiroaki ; Motokawa, Shinji ; Ishizuka, Masanori ; Mizuno, Jun ; Momma, Toshiyuki ; Osaka, Tetsuya ; Shoji, Shuichi. / Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (μDMFC). Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. pp. 1437-1440
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AU - Momma, Toshiyuki

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