Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell

Masanori Ishizuka, Hiroaki Houjou, Shinji Motokawa, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.

Original languageEnglish
Pages (from-to)7944-7948
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number10 A
DOIs
Publication statusPublished - 2006 Oct 15

Fingerprint

Methanol fuels
Photoresists
Metallizing
photoresists
fuel cells
sprayers
coating
Fuel cells
methyl alcohol
Coatings
microstructure
Microstructure
Electrodes
electrodes
etching
Anisotropic etching
Direct methanol fuel cells (DMFC)
Wet etching
Reactive ion etching
Open circuit voltage

Keywords

  • μDmfc
  • 3-d electrode
  • 3-d microfabrication
  • Fuel cell
  • Spray coating

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

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abstract = "High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.",
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AU - Ishizuka, Masanori

AU - Houjou, Hiroaki

AU - Motokawa, Shinji

AU - Mizuno, Jun

AU - Momma, Toshiyuki

AU - Osaka, Tetsuya

AU - Shoji, Shuichi

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AB - High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (μDMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm2 were obtained at room temperature with 2 M methanol.

KW - μDmfc

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KW - 3-d microfabrication

KW - Fuel cell

KW - Spray coating

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