Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy

Hiroyuki Odagawa, Koshiro Terada, Hiroaki Nishikawa, Takahiko Yanagitani, Yasuo Cho

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.

    Original languageEnglish
    Pages (from-to)47-51
    Number of pages5
    JournalFerroelectrics
    Volume498
    Issue number1
    DOIs
    Publication statusPublished - 2016 Aug 31

    Fingerprint

    Dielectric films
    polarity
    Microscopic examination
    microscopy
    Zinc Oxide
    Scanning
    Thin films
    scanning
    Surface measurement
    thin films
    Zinc oxide
    Magnetron sputtering
    Oxide films
    Ferroelectric materials
    signal measurement
    profiles
    zinc oxides
    oxide films
    radio frequencies
    magnetron sputtering

    Keywords

    • non-destructive measurement
    • polarity inverted structure
    • polarity measurement
    • Scanning nonlinear dielectric microscopy

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

    Cite this

    Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy. / Odagawa, Hiroyuki; Terada, Koshiro; Nishikawa, Hiroaki; Yanagitani, Takahiko; Cho, Yasuo.

    In: Ferroelectrics, Vol. 498, No. 1, 31.08.2016, p. 47-51.

    Research output: Contribution to journalArticle

    Odagawa, Hiroyuki ; Terada, Koshiro ; Nishikawa, Hiroaki ; Yanagitani, Takahiko ; Cho, Yasuo. / Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy. In: Ferroelectrics. 2016 ; Vol. 498, No. 1. pp. 47-51.
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    AU - Cho, Yasuo

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