Method of probe measurement in N2SiH4 microwave plasma

Isamu Kato, Tadashi Sakamoto, Tsuyoshi Shimoda

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

It has been clarified that probe current decreases linearly with increasing deposition time of a SiN film on a probe. From this result, a probe current-voltage characteristic without any deposition of the SiN film can be extrapolated from some probe current-voltage characteristics of different deposition times of the SiN film.

Original languageEnglish
Pages (from-to)307-310
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume33
Issue number1 A
Publication statusPublished - 1994 Jan

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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