Micro-driving mechanisms utilizing force generated in pin-to-plate gas discharge system

Two driving mechanisms were constructed and these characteristics were investigated. The mechanisms utilize force generated in a pin-to-plate gas discharge system that consisted of a rigid pin electrode and a plate electrode. One of the driving mechanisms utilizes force generated at dark discharge region, because attractive force, in the order of 10 μN, was induced to the pin electrode due to the Coulomb force at this region. A stator consisted of parallel plate electrodes on a plastic plate and small linear movers were needle and/or plate electrodes on floating plastic plates. Experimental investigation deduced that (1) the speed of the movers was increased at high frequency of the applied voltage and a small air gap, but (2) the motion of the movers were out of tuning over a threshold frequency. Another driving mechanism utilizes force generated at corona discharge, because corona discharge took place over a certain threshold voltage and a relatively large repulsive force, in the order of 100 μN, was induced to the pin electrode due to the ionic wind. The force was almost tangential to the pin electrode even when the pin electrode inclined to the plate electrode. This force was utilized for driving small linear and rotational movers on water. The linear mover was an inclined pin electrode on a floating plate and the rotational mover consisted of two inclined pin electrodes on a floating disk at point-symmetrical positions. Experimental investigation deduced that (1) the driving force was induced over the corona onset voltage, (2) the driving force or torque were maximum when the inclination angle was 45 degrees, and (3) the speed of the movers was increased at high applied voltage and a small air gap.