A micro flow cell for blood gas monitoring is fabricated on a silicon wafer to realize a very small sample volume. It has a Clark-type micro PO2 sensor, a Severinghaus-type microPCO2 sensor and an ISFET-type pH sensor. The cell size is 1.0 cm × 0.6 cm × 0.8 cm and the necessary sample volume is about 0.34 μl.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry