Micro Flow Devices

Shuichi Shoji, Takahiro Arakawa, Masaki Kanai, Hironobu Sato

    Research output: Contribution to journalArticle

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)395-399
    Number of pages5
    JournalShinku/Journal of the Vacuum Society of Japan
    Issue number7
    Publication statusPublished - 2006 Jan 1

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

    Cite this