Micro Flow Devices

Shuichi Shoji, Takahiro Arakawa, Masaki Kanai, Hironobu Sato

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)395-399
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume49
Issue number7
DOIs
Publication statusPublished - 2006 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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