Micro Flow Devices

Shuichi Shoji, Takahiro Arakawa, Masaki Kanai, Hironobu Sato

    Research output: Contribution to journalArticle

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)395-399
    Number of pages5
    JournalShinku/Journal of the Vacuum Society of Japan
    Volume49
    Issue number7
    DOIs
    Publication statusPublished - 2006 Jan 1

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

    Cite this

    Micro Flow Devices. / Shoji, Shuichi; Arakawa, Takahiro; Kanai, Masaki; Sato, Hironobu.

    In: Shinku/Journal of the Vacuum Society of Japan, Vol. 49, No. 7, 01.01.2006, p. 395-399.

    Research output: Contribution to journalArticle

    Shoji, S, Arakawa, T, Kanai, M & Sato, H 2006, 'Micro Flow Devices', Shinku/Journal of the Vacuum Society of Japan, vol. 49, no. 7, pp. 395-399. https://doi.org/10.3131/jvsj.49.395
    Shoji, Shuichi ; Arakawa, Takahiro ; Kanai, Masaki ; Sato, Hironobu. / Micro Flow Devices. In: Shinku/Journal of the Vacuum Society of Japan. 2006 ; Vol. 49, No. 7. pp. 395-399.
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