Microactuators based on newly developed pseudostatic displacement mechanism

Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new driving mechanism of a microactuator is reported. The actuator is composed of folded suspensions and a mass. The driving mechanism is interesting because the actuator generates large static displacement when over all suspension oscillates at a higher mode resonance. Since this phenomenon (pseudo-static displacement) was observed in the actuator made of various materials, it seems to be an effect common to this shape of actuator, and can be applied to design a small actuator which generates large static displacement with low driving voltage. This paper deals with the typical structure of the actuator and mechanical characteristics of pseudo-static displacement. Mechanism of pseudo-static displacement is briefly discussed.

Original languageEnglish
Title of host publicationAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
Place of PublicationNew York, NY, United States
PublisherASME
Pages989-994
Number of pages6
Volume57-2
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1995 ASME International Mechanical Engineering Congress and Exposition - San Francisco, CA, USA
Duration: 1995 Nov 121995 Nov 17

Other

OtherProceedings of the 1995 ASME International Mechanical Engineering Congress and Exposition
CitySan Francisco, CA, USA
Period95/11/1295/11/17

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ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

Cite this

Toshiyoshi, H., Kobayashi, D., Fujita, H., & Ueda, T. (1995). Microactuators based on newly developed pseudostatic displacement mechanism. In American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC (Vol. 57-2, pp. 989-994). ASME.