Microfabrication and microsensors

Shuichi Shoji, Masayoshi Esashi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.

Original languageEnglish
Pages (from-to)21-34
Number of pages14
JournalApplied Biochemistry and Biotechnology
Volume41
Issue number1-2
DOIs
Publication statusPublished - 1993 Apr
Externally publishedYes

Fingerprint

Microtechnology
Microsensors
Microfabrication
Micromachining
Blood gas analysis
Pressure sensors
Blood Gas Analysis
Networks (circuits)
Chemical analysis
Technology
Pressure
Equipment and Supplies

Keywords

  • LSI technologies
  • microfabrication
  • micromachining
  • Microsensors

ASJC Scopus subject areas

  • Bioengineering
  • Biotechnology
  • Biochemistry
  • Biochemistry, Genetics and Molecular Biology(all)

Cite this

Microfabrication and microsensors. / Shoji, Shuichi; Esashi, Masayoshi.

In: Applied Biochemistry and Biotechnology, Vol. 41, No. 1-2, 04.1993, p. 21-34.

Research output: Contribution to journalArticle

Shoji, Shuichi ; Esashi, Masayoshi. / Microfabrication and microsensors. In: Applied Biochemistry and Biotechnology. 1993 ; Vol. 41, No. 1-2. pp. 21-34.
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