Microfabrication and microsensors

Shuichi Shoji, Masayoshi Esashi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.

Original languageEnglish
Pages (from-to)21-34
Number of pages14
JournalApplied Biochemistry and Biotechnology
Volume41
Issue number1-2
DOIs
Publication statusPublished - 1993 Apr 1

Keywords

  • LSI technologies
  • Microsensors
  • microfabrication
  • micromachining

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Biochemistry
  • Applied Microbiology and Biotechnology
  • Molecular Biology

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