Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

T. Katoh, D. Yamaguchi, Y. Satoh, S. Ikeda, Y. Aoki, M. Washio, Y. Tabata

Research output: Contribution to journalConference articlepeer-review

33 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy