Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    8 Citations (Scopus)

    Abstract

    Micromachining, based on photolithography commonly used in integrated circuit technology, has been applied to miniaturize chemical and bio-chemical analysis systems. Micro/miniaturized total analysis systems (μTAS), developed so far, can be classified into two groups. One is a MEMS-type system using pressurized flow by mechanical flow control devices, for example, microvalves and micropumps. The other uses electrically driven liquid handling without mechanical elements. Typically electroosmotic flow has been used so far. Planar capillary electrophoresis (chip CE) type systems are the common application of this method. Microfabrication technologies and micro flow control devices applied to the chemical and biochemical micro flow systems are reviewed.

    Original languageEnglish
    Title of host publication1999 International Microprocesses and Nanotechnology Conference
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages72-73
    Number of pages2
    ISBN (Electronic)4930813972, 9784930813978
    DOIs
    Publication statusPublished - 1999 Jan 1
    Event1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
    Duration: 1999 Jul 61999 Jul 8

    Other

    Other1999 International Microprocesses and Nanotechnology Conference
    CountryJapan
    CityYokohama
    Period99/7/699/7/8

    Fingerprint

    Microfabrication
    Flow control
    Capillary electrophoresis
    Micromachining
    Photolithography
    MEMS
    Integrated circuits
    Liquids
    Chemical analysis

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

    Cite this

    Shoji, S. (1999). Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. In 1999 International Microprocesses and Nanotechnology Conference (pp. 72-73). [797482] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797482

    Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. / Shoji, Shuichi.

    1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc., 1999. p. 72-73 797482.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Shoji, S 1999, Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. in 1999 International Microprocesses and Nanotechnology Conference., 797482, Institute of Electrical and Electronics Engineers Inc., pp. 72-73, 1999 International Microprocesses and Nanotechnology Conference, Yokohama, Japan, 99/7/6. https://doi.org/10.1109/IMNC.1999.797482
    Shoji S. Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. In 1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1999. p. 72-73. 797482 https://doi.org/10.1109/IMNC.1999.797482
    Shoji, Shuichi. / Microfabrication technologies and micro-flow devices for chemical and bio-chemical micro flow systems. 1999 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc., 1999. pp. 72-73
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