Abstract
Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
| Original language | English |
|---|---|
| Pages (from-to) | 157-171 |
| Number of pages | 15 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 4 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1994 Dec |
| Externally published | Yes |
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ASJC Scopus subject areas
- Instrumentation
- Materials Science(all)
- Mechanics of Materials
- Computational Mechanics
Cite this
Microflow devices and systems. / Shoji, Shuichi; Esashi, Masayoshi.
In: Journal of Micromechanics and Microengineering, Vol. 4, No. 4, 12.1994, p. 157-171.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Microflow devices and systems
AU - Shoji, Shuichi
AU - Esashi, Masayoshi
PY - 1994/12
Y1 - 1994/12
N2 - Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
AB - Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
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UR - http://www.scopus.com/inward/citedby.url?scp=0028698702&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/4/4/001
DO - 10.1088/0960-1317/4/4/001
M3 - Article
AN - SCOPUS:0028698702
VL - 4
SP - 157
EP - 171
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 4
ER -