Microflow devices and systems

Shuchi Shoji, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

414 Citations (Scopus)


Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.

Original languageEnglish
Article number001
Pages (from-to)157-171
Number of pages15
JournalJournal of Micromechanics and Microengineering
Issue number4
Publication statusPublished - 1994
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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