Abstract
Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
| Original language | English |
|---|---|
| Article number | 001 |
| Pages (from-to) | 157-171 |
| Number of pages | 15 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 4 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1994 Dec 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Shoji, S., & Esashi, M. (1994). Microflow devices and systems. Journal of Micromechanics and Microengineering, 4(4), 157-171. [001]. https://doi.org/10.1088/0960-1317/4/4/001