Microfluidic valve array control system integrating a fluid demultiplexer circuit

Kentaro Kawai, Kenta Arima, Mizuho Morita, Shuichi Shoji

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)


    This paper proposes an efficient control method for the large-scale integration of microvalves in microfluidic systems. The proposed method can control 2<sup>n</sup> individual microvalves with 2n + 2 control lines (where n is an integer). The on-chip valves are closed by applying pressure to a control line, similar to conventional pneumatic microvalves. Another control line closes gate valves between the control line to the on-chip valves and the on-chip valves themselves, to preserve the state of the on-chip valves. The remaining control lines select an activated gate valve. While the addressed gate valve is selected by the other control lines, the corresponding on-chip valve is actuated by applying input pressure to the control line to the on-chip valves. Using this method would substantially reduce the number of world-to-chip connectors and off-chip valve controllers. Experiments conducted using a fabricated 2<sup>8</sup> microvalve array device, comprising 256 individual on-chip valves controlled with 18 (2 x 8 + 2) control lines, yielded switching speeds for the selected on-chip valve under 90 ms.

    Original languageEnglish
    Article number065016
    JournalJournal of Micromechanics and Microengineering
    Issue number6
    Publication statusPublished - 2015 Jun 1


    • demultiplexer
    • fluid logic circuit
    • hydraulic valve
    • microvalve
    • pneumatic valve
    • valve control system

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering
    • Mechanics of Materials
    • Electronic, Optical and Magnetic Materials

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